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329期 玻璃周刊 一周玻璃新鲜事(2025.10.13

2026-06-19 09:55:54娱乐
銀緯5.83,其B1900.0坐标为赤經,HR 6366, 参考文献 154783 6366 208467赤緯。SAO 208467、视星等为5.97,是一颗恒星,位于銀經354.33,

HD 154783,又名CD-3013840,

329期 玻璃周刊 一周玻璃新鲜事(2025.10.13

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  • Fox News Flash top sports headlines for March 23

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    Legendary college basketball coach Bill Self said Sunday he was unsure about his future in the sport after the Kansas Jayhawks lost on a buzzer-beater to St. John’s.

    Self said he wasn’t sure if he was going to return for another season. The 63-year-old has won two national championships in 23 seasons with the Jayhawks. But the last few years have been marred due to heart issues and other health conditions.

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    Bill Self calls out a play on the sideline

    Kansas head coach Bill Self reacts as the team plays California Baptist during the first half in the first round of the NCAA college basketball tournament Friday, March 20, 2026, in San Diego. (AP Photo/Mark J. Terrill)

    "I’ve gone through some stuff off the court, so I’ll get back and get with family and visit and see what’s going on," Self said. "I love what I do. I need to be able to do it where I’m feeling good and healthy to do it fairly well. I’ll get back home, and it will all be discussed."

    Self missed a game at Colorado in January after taking a precautionary trip to the hospital. He also had two stents inserted in his heart in 2023, and two more last year.

    When asked about his health on Sunday, Self said he was unsure if he was "completely" healthy.

    TWO-TIME NCAA CHAMPION JALEN BRUNSON REVEALS WHAT IT TAKES TO BE GREAT IN MARCH MADNESS

    Bill Self yells on the sideline

    Kansas head coach Bill Self yells towards the court against St. John's during the first half of a game in the second round of the NCAA college basketball tournament Sunday, March 22, 2026, in San Diego. (AP Photo/Mark J. Terrill)

    "But I’m feeling — I feel as good as I’ve felt in a long time," Self added. "I’m not making any statements whatsoever. But every year, I think ... when you get to be doing it as long as I’ve done it, I look at it in five-year increments. Now I’m probably looking at it in more two-year increments, so to speak. So I try to focus on this season and try to get us to a second weekend, which we failed at. So I’ll go back now and break it down and see where that leads."

    The 2025-26 season ended with St. John’s guard Dylan Darling hitting a game-winning layup as time expired in the second-round matchup.

    "My career ain’t going to be based on one game," Self said when asked if it would be tough to end his career on such a crushing defeat. "I said I was going to get back and evaluate my health situation."

    Self took over the Jayhawks’ job before the 2003-04 season after three successful years at Illinois. He is 648-166 as Kansas’ head coach. Kansas made the NCAA Tournament in each season. He’s only had five seasons in which he had at least 10 losses.

    Bill Self upset

    Kansas head coach Bill Self motions towards the court during the first half of a game between Kansas and St. John's in the second round of the NCAA college basketball tournament Sunday, March 22, 2026, in San Diego. (AP Photo/Mark J. Terrill)

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    He was inducted into the Basketball Hall of Fame in 2017.

    The Associated Press contributed to this report.

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    " alt="Kansas' Bill Self unsure of coaching future after tournament loss">
    巴德士涂料荣获“2014最具影响力品牌”

    巴德士漆荣获“2014最具影响力品牌”

         10号—12号,注定是令人瞩目的日子,10号APEC会议各国首脑齐聚北京,11号“双十一”互联网购物狂欢节交易破500亿,12号巴德士环保漆同家居业的各位领袖精英齐聚在搜狐焦点家居的互联网盛典。当“互联网经济”作为新话题被引入中国主场的APEC会议,互联网经济推动的变革正迅速到来,互联网已经深入到我们生活的方方面面,包括与我们息息相关的家居行业。

      在当天的互联网盛典当中加入了很多独特新颖的网络元素,很多好玩的环节,“喜大普奔”、“且行且珍惜”、“累觉不爱”、“请叫我雷锋”……这是现场的互联网热词和弹幕,供大家选择和玩耍。大家可以把想说的话随时发到屏幕上,也可以提问在座的其他小伙伴,参与到轻松欢乐的弹幕吐槽中来,享受互联网带来的乐趣,众多企业的领导和代表也都聚集在一起,深入探讨家居互联网的未来。

    巴德士涂料荣获“2014最具影响力品牌”

    巴德士漆荣获“2014最具影响力品牌”

      巴德士漆近年来在互联网领域大展拳脚,已在网络宣传、网络招商、网络销售三个方面重点投入、着重发力,建立了天猫、京东、阿里巴巴等主流电商平台的官方旗舰店,建立和健全了巴德士漆的网络部门。在互联网上的持续发力,使得巴德士漆安全环保与优越的涂装性能为众多消费人群所熟知,品牌影响力不容小觑!互联网见证了巴德士在2014年所取得的卓越成就。

      作为涂料行业的领军品牌之一,环保漆第一品牌巴德士凭借自己强大的科技和创新能力,产品研发从消费者立场出发力求环保,为“好家居”代言,是当之无愧的“2014最具影响力品牌”!巴德士仍将借助互联网平台进一步提高品牌影响力,打造世界级的民族涂料领导品牌!

    " alt="巴德士涂料荣获“2014最具影响力品牌”">
    随着半导体制程向先进节点演进,3D 晶体管架构与多层互连堆叠技术的规模化应用,使得器件缺陷的隐蔽性与检测难度显著提升。传统光学检测技术已难以满足电学相关缺陷的识别需求,而电子束检测的效率瓶颈又制约了量产应用。DirectScan检测通过核心技术创新破解了这一行业痛点,为下一代半导体制造提供了高效、精准的检测解决方案。


    本文将从技术原理、核心优势、应用场景及落地实践等方面,对该技术进行系统性解析。


    一、先进工艺节点的检测挑战与技术缺口


    当前半导体制造技术正经历关键变革:鳍式场效应晶体管逐步被全环绕栅极(GAA)纳米带晶体管替代,中段制程(MOL)因多重图形化技术的应用,堆叠复杂度持续增加。这一变革导致致命缺陷多隐匿于 3D 结构内部,传统光学检测手段难以有效识别。


    同时,先进工艺节点的缺陷呈现显著的产品特异性,集中分布于特定工艺 - 版图组合的 “热点区域”,此类缺陷由芯片设计固有的版图特征引发,成为影响良率的核心因素。


    行业面临的核心矛盾在于电子束电压衬度检测是识别电学缺陷的关键技术,但传统电子束检测采用光栅扫描模式,效率远低于光学检测,无法匹配大批量生产的需求。DirectScan 技术的出现,为破解这一矛盾提供了可行路径。


    925a6ee0-271d-11f1-96ea-92fbcf53809c.png


    二、DirectScan 核心技术架构:PointScan 的创新逻辑


    DirectScan 检测方案由eProbe 电子束检测工具FIRE GDS 版图分析平台Exensio 大数据智能分析平台三大核心组件构成,其技术突破的核心在于PointScan 扫描技术对传统电子束检测逻辑的重构,主要体现在以下三方面:


    1

    设计感知驱动的靶向检测

    传统电子束检测采用无差别光栅扫描,需覆盖包括介质区域在内的全部区域,且无法识别被测目标的图形特征;PointScan 技术具备非接触式电学测试特性,可精准跳转至目标器件的关键位置(如焊盘、接触点),仅对有效检测区域实施电压衬度检测,完全规避介质区域的无效扫描,实现 “按需检测”。

    9283ecde-271d-11f1-96ea-92fbcf53809c.png


    2

    检测效率的量级提升

    通过 FIRE 平台的精细化版图分析,可精准筛选出需检测的 “关键区域”,大幅缩减检测范围:

    后段制程金属 3 层通孔检测:仅需扫描总可检测面积的 2.5%

    中段制程栅极 - 漏极短路检测:仅需扫描总接触点的 1%

    栅极残筋检测:可规避 50%-75% 的介质区域,检测面积缩减至传统方案的 10% 以下


    基于上述优化,PointScan 技术的检测吞吐量可达传统单束电子束检测设备的 20-100 倍,每小时可完成数十亿个被测器件的扫描。


    3

    设计感知学习与属性分析能力

    DirectScan 与 FIRE 平台的深度整合,可实现跨多层版图的属性提取,包括触点类型(漏极 / 栅极)、晶体管阈值电压、极性、与扩散区隔离槽的距离等关键参数。


    eProbe 输出的 KLARF格式数据含专属属性识别码,可与版图特征精准匹配,工程师可直接计算特定属性或属性组合对应的缺陷率,快速定位高风险晶体管类型与版图设计方案,为工艺优化提供数据支撑


    三、高难度场景的应用突破


    PointScan 技术的低电荷沉积特性,使其在传统电子束检测难以覆盖的场景中实现突破:


    背侧供电网络(BSPDN)晶圆检测


    键合晶圆形成的绝缘层会阻碍电荷传导,导致传统电子束检测出现电荷累积、电子束偏折与失焦问题;PointScan 技术大幅降低单位面积电荷沉积量,有效缓解上述问题,已完成实际应用验证。


    3D DRAM检测


    3D DRAM 的结构特性同样易引发电荷累积,此前检测难度较高,DirectScan 技术的应用使该类器件的精准检测成为可能。


    DRAM 阵列短路检测


    独有的可控 “充电 - 检测” 功能,可在指定位置施加电荷后跳转至目标区域采集电压衬度信号,使特定岛状节点呈现高亮状态,清晰识别与浮空相邻触点的短路问题,该功能为传统光栅扫描技术所不具备。


    四、行业落地实践与全流程应用


    自 2022 年初起,eProbe 检测系统已在多家先进逻辑芯片制造工厂落地,目前两套设备投入大批量生产,第三套设备处于产能爬坡阶段,应用场景覆盖半导体制造全流程


    先进逻辑芯片制造


    中段制程:GAA 栅极 - 漏极短路、栅极接触孔开路、栅极外延层 / 硅化物层开路检测

    后段制程:M0 层、1X 层、2X 层系统性接触孔开路与金属布线短路检测

    背侧供电网络:电源通孔、源极 / 漏极通孔接触孔开路与短路检测

    随机逻辑电路漏电情况评估


    先进 DRAM 制造(2024-2025 年)


    外围电路:栅极 - 栅极残筋短路、栅极 - 漏极短路、字线 - 字线短路与开路检测及缺陷定位

    存储阵列:基于可控 “充电 - 检测” 技术的存储节点短路检测


    技术总结


    在半导体制程向更精密 3D 架构演进的背景下,检测技术的创新成为保障良率的关键。DirectScan 方案通过 PointScan 靶向扫描技术、设计感知分析能力与产品特异性缺陷学习功能的融合,在保留电子束检测高灵敏度的基础上,实现了检测吞吐量的量级提升,同时破解了高难度场景的检测难题


    该技术不仅解决了先进工艺节点下缺陷难识别、难检测” 的问题,更推动半导体检测从 “缺陷识别” 向 “工艺优化赋能” 升级,为下一代半导体制造提供了核心技术支撑和全新路径。

    " alt="DirectScan 技术解析:下一代半导体电子束检测的创新路径与应用">

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